Analyzing the Impact of X-ray Tomography on the Reliability of Integrated Circuits
Published: |
March 18, 2021 |
Author: |
Halit Dogan, Md Mahbub Alam, Navid Asadizanjani, Sina Shahbazmohamadi, Domenic Forte and Mark Tehranipoor |
Abstract: |
X-ray tomography is a promising technique that can provide micron level, internal structure, and three dimensional (3D) information of an integrated circuit (IC) component without the need for serial sectioning or decapsulation. This is especially useful for counterfeit IC detection as demonstrated by recent work. Although the components remain physically intact during tomography, the effect of radiation on the electrical functionality is not yet fully investigated. In this paper we analyze the impact of X-ray tomography on the reliability of ICs with different fabrication technologies.... |
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