A PROM Element Based on Salicide Agglomeration of Poly Fuses in a CMOS Logic Process
Published: |
May 7, 1999 |
Author: |
Intel Corp. |
Abstract: |
A novel programmable element has been developed and evaluated for state of the art CMOS processes. This element is based on agglomeration of tVarious aspects of these programmable devices including characterization and optimization of physical and electrical aspects of the element, programming yield, and reliability have been studied. Development ofhe Ti-silicide layer on top of poly fuses. ... |
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