Technical Articles From The Foundation for Scientific and Industrial Research - SINTEF

Read technical articles about electronics manufacturing added by The Foundation for Scientific and Industrial Research - SINTEF

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Articles from The Foundation for Scientific and Industrial Research - SINTEF

1 technical article added by The Foundation for Scientific and Industrial Research - SINTEF

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Scandinavia's largest independent research organisation. Every year, SINTEF supports research and development at 2,000 or so Norwegian and overseas companies via its research and development activity.

Trondheim, Norway

Association / Non-Profit

+47 73 59 30 00
+47 73 59 33 50

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(1) technical library article

Wafer-Level Packaged MEMS Switch With TSV

Feb 02, 2012 | Nicolas Lietaer, Thor Bakke, Anand Summanwar (SINTEF), Per Dalsjø, Jakob Gakkestad (Norwegian Defence Research Establishment), Frank Niklaus (KTH – Royal Institute of Technology)

A miniaturized wafer-level packaged MEMS acceleration switch with through silicon vias (TSVs) was fabricated, based on technologies suitable for harsh environment applications. The high aspect ratio TSVs were fabricated through the silicon-on-insulator (S...